fastMES for Semiconductor FAB front-end and back-end flowIn the FAB front-end clean room, an operator carries a wafer cassette through the exposure, photo, etch and deposition tools in turn. At each tool the LOT is checked in with a PDA, recipe management (RMS) downloads and loads the recipe for that tool, process data is collected in real time during processing, and the LOT is checked out with a PDA. After deposition, the same sequence repeats from exposure for the next layer. In the FAB back-end, LOTs are started with a tablet and wafers pass through grinding and lapping, dicing, die attach, bonding, molding and ET in turn, and LOT completion is registered with a PDA. All LOT history and equipment data are gathered in fastMES.PASSLOT inLOT outRCPRecipe loadedData collectedRecipe loadedData collectedRecipe loadedData collectedRecipe loadedData collectedfastMESRecipe management (RMS)Process data (EDC · SPC)1Exposure2Photo3Etch4Deposition1Grinding · Lapping2Dicing3Die attach4Bonding5Molding6ETRepeat · Layer 1Repeat · Layer 2Repeat · Layer 3LOT in · TabletLOT out · PDAFAB front-end · Clean roomFAB back-endLOT in · outRecipe loadingEquipment · process data

fastMES for Semiconductor

fastMES for Semiconductor is an MES specialized for semiconductor companies that process wafers and package chips. It controls both front-end and back-end FAB processes and manages recipes and characteristics down to the individual wafer.

Benefit
Real-time collection and analysis of process data / Precise root-cause tracing of abnormal yield / Automatic generation of customer-specific tags and test reports / Real-time quality tracking by customer / Automatic quality judgment of measurement data / Process standardization / Lower compliance costs

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Conceptual Diagram

MES sits at the center of the system and serves as the information hub of the entire manufacturing system. It receives basic information such as production and delivery plans and product and material data from the ERP system and carries out the actual production activities. It manages the entire flow of semiconductor manufacturing (wafer fabrication and packaging for memory, non-memory, foundry, LED and more) and replaces conventional traveler sheets and run sheets.

Conceptual Diagram

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